Martini, P., Kanellopulos, K., & Schmid, S. (2023). Towards Photon-Noise Limited Thermal IR Detection with Optomechanical Resonators. In 2023 IEEE SENSORS. 2023 IEEE SENSORS, Vienna, Austria. IEEE. https://doi.org/10.1109/SENSORS56945.2023.10325323
In this study, we propose an advancement of the state-of-the-art uncooled thermal IR sensing utilizing silicon nitride nano-optomechanical resonators integrated with a broadband absorber layer of platinum. By characterizing the frequency stability and relative responsivity to impinging electromagnetic power of our sensors, we determine a noise equivalent power (NEP) as low as $275\ pW/\sqrt{Hz}$. Our findings contribute to the development of high-sensitivity uncooled thermal IR detectors, potentially eliminating the reliance on cryogenic cooling, towards the photon-noise limit.
