Schlögl, M., Weißenbach, J., Schneider, M., & Schmid, U. (2023). Stress engineering of polycrystalline aluminum nitride thin films for strain sensing with resonant piezoelectric microbridges. Sensors and Actuators A: Physical, 349, Article 114067. https://doi.org/10.1016/j.sna.2022.114067