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Title
Aerosol-assisted CVD of thioether-functionalised indium aminoalkoxides
AuthorBiegger, Felix ; Jungwirth, Felix ; Seifner, Michael Stanislaus ; Rameshan, Christoph ; Barth, Sven
Published in
Monatshefte für Chemie - Chemical Monthly, 2017, Vol. 148, Issue 8, page 1385-1392
PublishedSpringer Vienna, 2017
LanguageEnglish
Document typeJournal Article
Keywords (EN)AACVD / Oxysulphides / Indium aminoalcoholates / Thin films / Nanowires
URNurn:nbn:at:at-ubtuw:3-4164 Persistent Identifier (URN)
DOI10.1007/s00706-017-1980-2 
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 The work is publicly available
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Aerosol-assisted CVD of thioether-functionalised indium aminoalkoxides [1.59 mb]Supplementary material [0.15 mb]
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Abstract (English)

Thioether-functionalised indium aminoalcoholates have been used as single-source precursors in aerosol-assisted CVD processes. The obtained In2O3x S x oxysulphide deposits show either a single indium sulphide phase for deposits with high sulphide content [>75% (S/(S + O)) for the t-butyl derivatives] or pronounced phase separation in indium oxide and indium sulphide for lower sulphide content [<62% (S/(S + O)) for the n-butyl derivatives]. In addition to thin films, polycrystalline 1D structures are obtained at slightly modified synthesis conditions. The materials are analysed by EDX, XRD, XPS, SEM, and TEM.

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CC-BY-License (4.0)Creative Commons Attribution 4.0 International License