The technology of electrochemical dissolution via use of ultra short voltage pulses (PECM) offers great potential for machining of high-tech materials and manufacturing of smallest structures. Based on the principle of electrolysis, there is no physical contact between the tool and the workpiece electrodes, but instead dissolution of atoms and molecules takes place in an electro conductive medium named electrolyte. By this means it is possible to machine brittle materials as well as metallic composite materials which are commonly used in aerospace applications in a thermally and mechanically neutral fashion. The use of ultra short voltage pulses enables the machining of finest structures in the micro-meter-scale, which cannot easily be manufactured with other technologies. Micro-structuring of component surfaces can improve their physical and mechanical properties which then can be optimized according to their application one speaks of functionalized surfaces. In the course of integrating this manufacturing technology into the ongoing research operation at the Institute for Production Engineering and Laser Technology at the Vienna University of Technology, it is necessary to evaluate the precision range of the ECMTEC machine tool via use of highly accurate measuring equipment and methods. In the course of experimental investigations, tool electrodes for the micro-structuring of surfaces are produced by reversing the electrolysis process using the same machine tool. Their geometric shapes are selected in such a way that workpiece surfaces with water-repellent properties can subsequently be produced. In addition to the investigation of the optimal process parameters for the production of tool electrodes, in which both the positive and the negative electrode are made of pure tungsten, experiments are also carried out on the hot working steel 1.2343 (X37CrMoV5-1). Due to the microstructural electochemical processing the materials surface shall meet a special physical requirement, which is a high degree of hydrophobicity. In order to achieve the therefore required micro structures, the electrochemical process has to be optimized by appropriate selection of process parameters and the electrolyte depending on the material pairing (tool and workpiece).