Product and process development constitutes a critical factor to the success and the survival of enterprises in any industrial sector. As part of the innovation process it therefore forms a central element of the business culture today and in the future. Through increasing digital networking of products, processes as well as resources as part of the industry objective of “Industry 4.0” in the future, the importance of process development in the design of such networked processes will only increase. It is therefore imperative to deal with questions as: “How can the development of such cyber-physical production systems be efficiently supported and executed in the future”, as early as possible. Especially regarding the increasing information flow which will be connected to the material flow in such a networking scenario the question of how to depict such processes arises. The answer to this question poses as foundation for further analysis and design of said processes. Business process management as origin of modern process analysis today offers a valuable toolbox of methods for the handling of similar problems. Thus, the goal of this empiric work is to try to answer the questions, if and which qualitative and quantitative methods of process analysis seem to be suitable to support the development of modern cyber-physical production processes. To research the potential to support a real process development project, a defined set and combination of methods is applied and empirically evaluated as part of a case study. The first part of this work serves to acquire a comprehensive theoretical basis for the range of methods used in the case study. In this case, the goal is to deliver an ex-haustive enumeration and comparison of state-of-the-art methods and tools for qualitative and quantitative process analysis in the context of business process management. The second part of this thesis treats the application and empiric evaluation of a defined combination of methods for the planning and development of a real production process as part of a case study performed at a company in the field of mechanical and plant engineering. Of particular interest is the use of the process modelling language BPMN 2.0, as part of the set of methods, in a novel problem field in the field of industrial production, to evaluate its suitability aside from usual “office processes”. The analysis of the outcomes delivers positive results. The effectivity of such a set of methods used for the support of process development is given. However, its application can only be carried out efficiently, when the set of methods is incorporated as an active element of process design during the development phase. The BPMN 2.0 reveals to be very suitable to depict cyber-physical production processes.