Given the highly competitive nature of the semiconductor industry, one of the main objectives of an enterprise is maintaining low manufacturing costs. There are two diverging policies to cope with the competition pressure: either outsource production to low-wage countries or increase the degree of automation to enhance the output per man-hour. This paper describes the projectâ s aim to stimulate the latter by creating an affordable way of automating existing production sites with a minimum impact on the manufacturing plantâ s established processes while concentrating on manufacturing effectiveness and productivity [Hau07]. To achieve the goals above, both internal machine sequences and wafer loading/ unloading procedures must be automated, creating a continuous process flow.^ ^Integrating the latest machines processing wafers with a diameter of twelve inches into a fully automated factory can be done using state of the art solutions as their load ports are standardized and optimized for the integration of conveying systems. However, due to a historically grown production site, most of the load ports for eight inch machines differ in height, angle and accessibility, and have various apertures and door mechanisms. The aim of automatically controlled load and unload sequences is achieved by the mobile Factory Integrated Robotic Effector (FIRE). The succession from a finished process at machine N to the start of the process at machine N+1 can be divided into three subtasks: 1. Using FIRE, the carrier is unloaded, boxed, and thereby placed on an interface to the transportation system, called the equipment buffer. 2. The transportation system (e.g. an operator) conveys the box to another equipment buffer close to the subsequent machine. 3.^ A FIRE at the machine takes the carrier out of the box in the equipment buffer and positions it on the machineâ s load port. To meet the demands given before, a system for handling wafer cassettes should fulfill the subsequent requirements. To easily overcome the narrow aisles in the cleanroom environment the suggested robot system uses an omnidirectional platform composed of four motor-driven omni-drive modules. The power necessary is delivered by a rechargeable battery. To guarantee a continuous production 24 hours a day, the system is equipped with an automatic battery-changing mechanism at a â power homeâ . To achieve the agility required for loading within narrow confines, kinematic redundancy is exploited by the systemâ s arm via eight degrees of freedom: seven provided by the robot-arm itself and an additional one added by extending the robotgripper with a modulus of torsion.^ As an autonomous, mobile wafer-handling cleanroom robot sharing the workspace with humans operating 24/7 the FIRE-handling is intrinsically innovative. Regardless of the systemâ s extensive portfolio of innovative solutions, the accurate positioning of the mobile robotâ s tool centre point is truly intrepid. It should work with a repeatability of 0.2 mm over an area of 130000 mm by 215000 mm. The precision of the advocated concept is attained by using a combination of three different sensor systems. The rough positioning is achieved by using an IPS (Indoor Positioning System) currently used to locate wafer boxes and assist the operator, wirelessly providing process information on a box-mounted display. It is used to supply the main laser navigation on the vehicle with data constraining the possible position to a clearly defined area.^ The laser navigation algorithm [TBF06] can achieve an accuracy of Â 15 mm including the heading uncertainty to reliably position the FIRE-vehicle in front of the machine. The meticulous precision is obtained by laser precision sensors to fine-tune the pre-programmed positions of the robot-arm. Finally a possible way of implementation is presented.