The unique electronic properties of ultimately thin materials like single layer graphene (SLG) or carbon nanomembranes (CNM) have attracted enormous attention as excellent candidates for future nanoelectronics. Disorder, as caused e.g. by collisions with high energetic electrons or ions, alter the electronic structure and therefore allow to modify and tailor the properties of these 2D material. Collision studies between ions and freestanding SLG are also of fundamental interest, because they bridge the gap between atomic collisions in gaseous and those in solid targets . To learn more about the microscopic interaction mechanism we built the new experimental setup NIELS (Neutral and Ion Energy Loss Spectrometry) based on the time-of-flight (TOF) technique. In addition to the TOF a Vienna electron statistics detector will be mounted , which enables us to combine these two methods and do coincidence measurements of electron emission, energy loss and charge exchange associated with highly charged ion impact on 2D materials simultaneously. A room-temperature electron beam ion source (Dreebit EBIS-A), which is equipped with a Wien filter and mounted on a high voltage platform, provides highly charged ions of different charge states Q at kinetic energies ranging from 100eVxQ to 12keVxQ. With this setup we achieve an energy resolution of <2%, which is sufficient to measure ! charge state enhanced kinetic energy loss  and aim on measure not only energy loss for charged and neutral transmitted ions/atoms due to interaction processes with conductors like SLG but also with insulators like boron nitride and CNM or semiconductor like molybdenum disulfide. In this thesis the design, installation and calibration of the NIELS setup will be described. First measurements performed with 1nm thick carbon nanomembranes as well as freestanding single layer graphene are presented in chapter 3.