Nieuwenhuis, J. H. (2005). Microsystems for particle analysis [Dissertation, Technische Universität Wien]. reposiTUm. https://resolver.obvsg.at/urn:nbn:at:at-ubtuw:1-19375
The thesis discusses the development of four new microsystems for the analysis of small particles (diameter 5-50 µm). The microsystems have been designed to take advantage of the unique physics found at the micro-scale. IC-technology has been used to fabricate the microsystems on a common silicon-glass platform.