Bibliographic Metadata

Title
Three-dimensional device simulation with Minimos-NT using the wafer-state-server / von Robert Entner
AuthorEntner, Robert
CensorGrasser, Klaus-Tibor ; Gehring, Andreas
Published2003
DescriptionXI, 60 Bl. : Ill., graph. Darst.
Institutional NoteWien, Techn. Univ., Dipl.-Arb., 2003
Annotation
Zsfassung in dt. Sprache
LanguageEnglish
Bibl. ReferenceOeBB
Document typeThesis (Diplom)
URNurn:nbn:at:at-ubtuw:1-12227 Persistent Identifier (URN)
Restriction-Information
 The work is publicly available
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