Bibliographic Metadata

Title
Aluminiumoxidabscheidung durch Plasma - CVD / Markus Fink
AuthorFink, Markus
CensorLaimer, Johann
Published2003
Description191 Bl. : Ill., graph. Darst.
Institutional NoteWien, Techn. Univ., Diss., 2003
Annotation
Zsfassung in engl. Sprache
LanguageGerman
Bibl. ReferenceOeBB
Document typeDissertation (PhD)
Keywords (GND)Aluminiumoxide / PECVD-Verfahren
URNurn:nbn:at:at-ubtuw:1-10901 Persistent Identifier (URN)
Restriction-Information
 The work is publicly available
Files
Aluminiumoxidabscheidung durch Plasma - CVD [7.74 mb]
Links
Reference
Classification
Stats
The PDF-Document has been downloaded 30 times.